Stiction - an overview | ScienceDirect Topics
Stiction occurs when some part of the MEMS device becomes fused to any part of the structure, resulting in reduced yields or device failure. The absence of surface tension in SCCO2 provides an excellent means to overcome stiction.
In this paper, we investigate surface energies and stiction of commonly used MEMS materials by contact angle measurements and atomic force microscopy (AFM). Dispersive and polar components of surface energies are calculated by Owens–
Stiction and anti-stiction in MEMS and NEMS | Acta Mechanica Sinica
First, some new experimental observations of stiction in radio frequency (RF) MEMS switch and micromachined accelerometers are presented. Second, some criteria for stiction of microstructures in MEMS and NEMS due to surface forces (such as capillary, electrostatic, van der Waals, Casimir forces, etc.) are reviewed.
Stiction and anti-stiction in MEMS and NEMS - cstam.org.cn
First, some new experimental observations of stiction in radio frequency (RF) MEMS switch and micromachined accelerometers are presented. Second, some criteria for stiction of microstructures in MEMS and NEMS due to surface forces (such as capillary, electrostatic, van der Waals, Casimir forces, etc.) are reviewed.
(PDF) On the stiction of MEMS materials - ResearchGate
2005年6月1日 · In this paper, we investigate surface energies and stiction of commonly used MEMS materials by contact angle measurements and atomic force microscopy (AFM). Dispersive and polar components of...
[PDF] Suppression of stiction in MEMS - Semantic Scholar
Stiction failures in microelectromechanical systems (MEMS) occur when suspended elastic members are unexpectedly pinned to their substrates. This type of device failure develops both in fabrication and during device operation, being a dominant source of yield loss in MEMS.
On the stiction of MEMS materials | Tribology Letters - Springer
In this paper, we investigate surface energies and stiction of commonly used MEMS materials by contact angle measurements and atomic force microscopy (AFM). Dispersive and polar components of surface energies are calculated by Owens–Wendt–Rabel–Kaelble method.
Suppression of Stiction in MEMS | MRS Online Proceedings …
Stiction failures in microelectromechanical systems (MEMS) occur when suspended elastic members are unexpectedly pinned to their substrates. This type of device failure develops both in fabrication and during device operation, being a dominant source of yield loss in MEMS.
Flexural contact in MEMS stiction - ScienceDirect
2012年9月1日 · Adhesive force between two solid surfaces can lead to stiction failure of the micro-electro-mechanical systems (MEMS) device. The competition between the adhesive force and the beam restoring force determines whether the stiction occurs or not.
In Situ Characterization of Induced Stiction in a MEMS
2007年4月10日 · We have developed experimental tools for inducing and quantifying changes in stiction on a large array of MEMS actuators. Thousands of elements were subjected to aggressive wear in order to produce shearing forces that contributed to …