Neural network approach for ferroelectric hafnium oxide phase ...
2023年5月1日 · The high-efficiency analysis of HZO phases involves automatic TEM dataset acquirement and a neural network based on a selective convolutional neural network to …
Epitaxial Ferroelectric HfO2 Films: Growth, Properties, and Devices ...
2021年4月13日 · Epitaxy of HZO was confirmed by reflection high-energy electron diffraction and TEM. XRD characterization (symmetrical scans) showed peaks that were indexed as o …
Direct growth of orthorhombic Hf0.5Zr0.5O2 thin films for
2021年4月22日 · The growth of HZO onto a preheated (700 °C) silicon substrate mimics the rapid thermal annealing, which allows the formation of smaller crystallites (~9.7 nm) with large …
Monolithic integration and ferroelectric phase evolution of …
2023年12月1日 · Hafnium zirconium oxide (HZO)-based ferroelectric field-effect transistors (FeFETs) are three-terminal devices with attractive properties for embedded memory and in …
Enhanced ferroelectricity in ultrathin films grown directly on …
2020年4月22日 · Here we demonstrate ferroelectricity in ultrathin (1 nm thick) Hf 0.8 Zr 0.2 O 2 (HZO), grown by low-temperature atomic layer deposition (ALD) on silicon. Second harmonic …
Temperature-Dependent {111}-Texture Transfer to Hf
2025年3月28日 · The deposition temperature of the HZO film analyzed by using TEM was 300 °C. The thicknesses of the {111}-oriented TiN bottom electrode, HZO film, and TiN capping layer …
In situ study of phase transition in HZO ferroelectric thin films via ...
2025年3月13日 · In this work, the high-energy electron beam of a transmission electron microscope (TEM) was used to tune the V O in HZO ferroelectric thin films, and to reveal the …
Metastable ferroelectricity driven by depolarization fields in ...
2022年7月6日 · The crystalline phases in HZO were identified using several TEM techniques, including conventional and high-resolution imaging (TEM/HRTEM), but also FFT.
Study of structural and electrical properties of ferroelectric HZO ...
2021年8月2日 · In this work, we study the structural and electrical properties of Hafnium Zirconium Oxide (HZO) thin films deposited by Hf 0.5 Zr 0.5 O 2 single-target sputtering to …
Effects of thickness scaling on the dielectric properties of Hf
2023年5月4日 · We present a systematic study of thickness scaling effects on the dielectric properties of Hf0.5Zr0.5O2 (HZO) ferroelectric thin films in this work. It is revealed that the …