Up to four Pulsar modules can be configured to the XP cluster platform, a member of ASM’s 300mm XP common platform series. Inert gas valve design that assures process control of ALD pulse / purge cycling, enabling minimum cycle time and maximum throughput.

Inert gas valve design that assures process control of ALD pulse / purge cycling, enabling minimum cycle time and maximum throughput. High-k for microelectromechanical systems (MEMS) applications.

EmerALD XP is a process module designed to deposit thin conformal metal and dielectric layers by atomic layer deposition (ALD) used for advanced CMOS gate stacks and other applications. Pulsar uses ALD to deposit the high-k dielectric materials required for advanced CMOS transistor high-k metal gates and other applications.

EmerALD XP is a process module designed to deposit thin conformal metal and dielectric layers by atomic layer deposition (ALD) used for advanced CMOS gate stacks and other applications. The EmerALD reactor chamber uses a showerhead-process gas distribution method to assure uniform gas delivery to the wafer surface.

We are offering our leading edge high-k technologies for 300 mm (12 in) and smaller wafer sizes in an unique competence center for Atomic Layer Deposition - ...

EmerALD XP is a process module designed to deposit thin conformal metal and dielectric layers by atomic layer deposition (ALD) used for advanced CMOS gate stacks and other applications. ALD works by exposing the heated wafer to controlled pulses of process gases. These pulses are each followed by purging.

ASM Eagle XP4是一款高端超高精度視覺輔助球形接合器,專為高速、高精度組裝微電子元件而設計,具有改進的帶頭式高清攝像機、接合器模塊、推進站和質量控制試驗站。

ASM XP4、P8300、P8200和脉冲星3000反应堆是ASM Emerlad 3000反应堆系列的成员,为氢冷和氦冷商用电力应用提供了卓越的可靠性和效率。 这些反应堆具有单一的长期压力容器、由不锈钢构成的燃料组件、控制部件和最高保护的高级安全机制。

ASM Eagle XP4 is a high-end ultra-high precision vision-aided ball bonder designed for high speed, high accuracy assembly of microelectronics components and featuring an improved bondhead mounted HD camera, a bonder module, thrumming station …

ASM XP4, P8300, P8200 and Pulsar 3000 reactors are some of the most reliable and versatile reactors in their class and offer superior operation for a variety of commercial power applications. These reactors provide maximum reliability, robustness and performance when operated safely, and are the premier choice for hydrogen-cooled and helium ...