Focused ion beam, also known as FIB, is a technique used particularly in the semiconductor industry, materials science and increasingly in the biological field for site-specific analysis, deposition, and ablation of materials. A FIB setup is a scientific instrument that resembles a scanning electron microscope (SEM).

2018年6月14日 · The Scanning Transmission Electron Microscope (STEM) scans the specimen surface in a rectangular (raster) pattern using a focused beam of electrons from a probe. The specimen must be prepared by making extremely thin slices to ensure that electrons are able to pass through and be scattered by the specimen.

原子探针断层扫描 (apt) 提供材料的原子分辨率 3d 组成分析。聚焦离子束 (fib) 显微镜是一项为 apt 表征进行高质量、定向和特定样品制备的基本技术。 了解更多 ›

2012年3月1日 · While TEM samples have been prepared with stand-alone ion-beam columns (often called single-beam FIBs) since the 1990s, the widespread use of FIB sample preparation was facilitated by the introduction of dual-beam FIBs, which combine two independent microscope columns, a focused ion beam and an electron beam, in the same machine.

A FIB setup is a scientific instrument that resembles a scanning electron microscope (SEM). However, while the SEM uses a focused beam of electrons to image the sample in the chamber, a FIB setup uses a focused beam of ions instead. Unlike an electron microscope, FIB is inherently destructive to the specimen.

双束聚焦离子束是一种多用途的分析技术，可以用于样品定位切割并将隐藏在各种基底材 料中的缺陷揭露出来。 最常见的用途之一就是制备TEM样品及截面分析。 服务项目： 横截面缺陷分析. 横截面数据量测. 纳米级超薄样品制备、TEM制样. （不做线路修补） 扫描电子显微镜 (SEM) 是一种介于 透射电子显微镜 和光学显微镜之间的一种观察手段。其利用聚焦的很窄的高能电子束来扫描样品, 通过光束与物质间的相互作用, 来激发各种物理信息, 对这些信息收集、放大、再成像以 …

In this paper, we report the use of the FIB automation function to improve STEM throughput. This enabled us to iterate the fabrication and evaluation expeditiously, accelerate the research and devel-opment, and improve the manufacturing quality of the devices. 2. FIB Automation Function.

The Strata 400 is a DualBeam™ system for high-resolution, high-contrast imaging and specimen preparation. It incorporates a field emission scanning electron microscope column and a focused ion beam column. Complete in-situ sample preparation capabilities and high-resolution imaging enables TEM samples to be prepared without breaking vacuum ...

Thermo Scientific™ FIB-SEMs provide nanometer-scale data about a material by various combinations of the precise sample modification of the FIB, the fast milling of the femtosecond laser, and the high-resolution imaging of the SEM.

過電子顕微鏡（stem）の活用が欠かせない。ところが、stemの試料作製では集束イオンビーム（fib）加工装置により試料厚を 100 nm前後に薄くする必要があり、熟練の技術者が作業しても迅速に必要な試料数を作製できないという課題があった。これに対し