The iQDP pump is a four-stage, positive displacement dry pump in which pairs of intermeshing rotors (of different profiles mounted on common shafts) are held in correct phase relation by a pair of timing-gears.

QDP and iQDP Drystar Vacuum Pumps 1 1 INTRODUCTION 1.1 Scope of this manual This manual provides information about the component parts of the BOC Edwards QDP/iQDP40 and QDP/iQDP80 Multi-stage Dry Pumps. General Assembly (GA) exploded views of both pumps are shown in Sections 2 to 9, together with a list

Ideal Vacuum | Vacuum Pumps, Vacuum Chambers, and Pump Repair

2012年5月3日 · The IQDP pump is a four-stage, positive displacement rotary pump in which pairs of intermeshing rotors (of different profiles mounted on common shafts) are held in correct phase relation by a pair of timing-gears.

BOC Edwards iQDP80 - Scope of Work. PTB Sales will perform the following: 1. Complete teardown and disassembly of the pump. 2. All parts are inspected and cleaned. 3. Parts are dimensionally evaluated. 4. Rebuild of the pump (All OEM parts used) 5. Final Tests. 6. Packaging and Shipping.

Type of Product: Vacuum pump, Dry pump Manufacturer: ED […]

This document provides instructions for an iQ Dry Pumping System. It includes: - An overview of the system components including iQDP pumps, gas modules, iQMB boosters, temperature control, exhaust, electrical systems, and control functions.

2023年2月24日 · 干式真空泵是半导体各制程中必备的通用设备，应用于单晶拉晶、Load-Lock、刻蚀、CVD、原子层沉积（ALD）、封装、测试等清洁严苛的制程。 EDWARDS干式真空泵系统有哪些系列和型号？ iH系列半导体干式真空泵型号包括：iH80、iH160、iH1000、iH1800. iXH系列半导体干式真空泵型号包括：iXH100、iXH200、iXH200H、iXH500H、iXH500Q、iXH610、iXH645H、iXH1210、iXH1210H、iXH1220H。 iXL系列半导体干式真空泵：iXL120 …

鋒魁科技 股份有限公司 鋒魁集團 鋒魁高真空 笠格科技 dry pump turbo pump ebara edwards kashiyama ebara: 50×40 65×40 a150wm a200w esa300w aa20w aa30v1 aa200 aa400 kashiyama: sd120h sd150l sd220l sd1209 sde120 sde1203 sd90viii sdl25k kashiyama: kmb603 kmb601 kmb1201 kmb1203 edwards:ih80 ih1000 ih1800 if1800 ifxk1 eh250 hmb2400 hmb3000 phmb3000 ulvac: lr3600

You can adjust the TCV to vary the operating temperature of the pump (measured at the temperature measurement point - Figure 11, item 16) between approximately 55 oC (minimum) and approximately 90 oC (maximum). If you need to adjust the TCV to suit your operating conditions, refer to Figure 11 and use the following procedure.