2024年11月15日 · XRD analysis revealed the formation of distinct intermediate ammonium yttrium fluoride phases depending upon the heat treatment temperature (150 − 500 °C) through the fluorination of Y 2 O 3 with NH 4 F. A stable YOF phase was formed ultimately at 300 °C. Plasma etching tests were performed using a mixture of CF 4 /Ar/O 2 gases for 1 h.

2020年9月9日 · The crystalline structure of trigonal YOF was confirmed by X-ray diffractometry (XRD). The etching behavior of the YOF coating was studied using inductively coupled CHF3/Ar plasma in comparison with those of the Al2O3 bulk and Y2O3 coating. Crater-like erosion sites and cavities were formed on the whole surface of the Al2O3 bulk and Y2O3 coating.

2025年1月1日 · Yttrium oxyfluoride (YOF) emerges as a promising replacement for yttrium oxide (Y 2 O 3) and yttrium fluoride (YF 3) coatings, aiming to suppress particle pollution and process drift. This paper details the successful preparation of high-purity, dense YOF coatings on Al 2 O 3 substrates through radio frequency magnetron sputtering.

2022年4月12日 · Using x-ray diffraction (XRD) and a high-resolution three-dimensional x-ray tomography microscope system (HR-XRM), a relatively large amount of Y 2 O 3 was found to have formed near the surface of the coating deposited with the Y 5 O 4 F 7 suspension, whereas the formation of Y 2 O 3 was minimized and the formation of yttrium oxyfluoride was ...

2023年2月15日 · X-ray diffraction (XRD, Ultima-IV) analysis was carried out using Cu–Kα (λ = 1.5418 Å) radiation in the scanning range of 10–90° (2θ) and at a scanning rate of 4°/min. X-ray photoelectron spectroscopy (K-Alpha, Thermo Scientific) was operated using a monochromatic Al-Ka X-ray source at 100 V with 450 mm spot size.

The crystalline structure of trigonal YOF was confirmed by X-ray diffractometry (XRD). The etching behavior of the YOF coating was studied using inductively coupled CHF3/Ar plasma in...

YOF: Yb3+, Er3+ powders with rhombohedral phase were successfully synthesized by using a modified sol-gel method with calcinating under a temperature range between 400 °C and 600 °C. A systematic...

2013年4月22日 · The crystalline structures of YF 3 and YOF submicron-crystals were observed using X-ray diffraction (XRD) on a D8 advance X-ray diffractometer (Bruker, Switzerland) with Cu Kα radiation (λ =...

2020年5月16日 · High-resolution X-ray diffraction (HRXRD) shows that the major and minor peaks of the coatings which were deposited at 112 kW stem from trigonal YOF and cubic Y2O3, respectively. Increasing the...

2021年9月2日 · Yttrium oxyfluoride (YOF) is garnering attention as a new plasma-resistant material with the potential to replace Y 2 O 3. 22 - 27 It was reported that the YOF coating prepared through ion plating was measured using in-plane X-ray diffraction (XRD), and their crystal structure did not change before and after exposure to fluorine plasma. 25 YF 3 ...