XPS Analysis of SiC Films Prepared by Radio Frequency
2012年1月1日 · According to XPS analysis, the films almost consist of higher energy C-Si bonds under the higher power and lower chamber pressure. The bond structure hypothesis is well consistent with our previously achieved experimental observations concerning the evolution of surface roughness and microhardness with varying the sputtering power and chamber ...
Normalized XPS spectra of Si 2p line, spectrally ... - ResearchGate
The high-resolution Si 2p XPS spectrum consists of a single peak with a binding energy of 102.64 eV, which was deconvoluted into two components at 102.61 and 103.51 eV corresponding to Si−C and...
Characteristics of low-κ SiOC films deposited via atomic layer ...
2018年1月1日 · XPS analysis demonstrated the bonding characteristics, which explained the results of the electrical and etching properties. Si C bonds in SiOC decreased the dielectric constant due to a low ionic polarization while the carbon content acted as a defect that induced leakage currents.
SiCO(H)薄膜材料及其前驱体的制备与性能表征-学位-万方数据知识 …
通过对各种候选低介电常数材料的性能和制备方法的综合分析，总结出SiCO(H)薄膜材料综合了无机材料良好的热稳定性和力学性能以及有机材料低k值的优点，为此，选取含有Si、C、O、H元素的前驱体分子为研究对象，通过溶胶凝胶的方法，利用旋涂工艺涂膜，获得 ...
XPS spectra of the Si 2 p peaks for the SiCO samples
The XPS analyses focused on examining and documenting the electronic environment (chemical bonding) of the Si 2 p , C 1 s , and O 1 s core energy levels as a means to provide an independent ...
Fabrication of powdered Si-O-C composite by electrodeposition ...
2019年9月15日 · The surface elemental characteristics of the pSi-O-C composite were analyzed by an X-ray photoelectron spectroscopy (XPS) measurement in Fig. 1 (b). To prevent oxidation of the pSi-O-C composite, the sample was transferred using a transfer vessel from an argon-filled glove box to a sample chamber.
XPS spectra of the Si 2p peaks for the as-deposited SiC-like, Si-C-O ...
Results reveal significant variations in composition and cluster morphology, influenced by the introduction of mesoporous silica tablets. The study demonstrates controlled deposition, consistent...
We have developed a technique to fabricate wedge polished samples (angle ~ 1x10-4 rad) that provides access to the SiO2/SiC interface via a surface sensitive probe such as x-ray photoelectron spectroscopy (XPS). Lateral scanning along …
XPS图谱分析之-Si2p 图谱分析（硅、硅化物、氧化硅、有机硅 …
XPS图谱分析之-Si2p 图谱分析（硅、硅化物、氧化硅、有机硅等）。 免费的分析、检测技术纯干货我们已经更新一个多月啦，感谢每一位粉丝的关注和积极反馈！
In this letter we report on the characterization of both SiC (®-SiC, Ultrafein, ESK, Germany) and Si (99.9%, Aldrich Chemical Company, USA) powders using X-ray photoemission spectroscopy, XPS (VG Scientific Ltd, England), and zeta potential measure-ment …