Silicon-Germanium (SiGe) composition and thickness …
The thickness and composition determination of Silicon-Germanium (SiGe) films have been demonstrated using simultaneous X-ray Photoelectron (XPS) and X-ray Fluorescence (XRF) …
XPS of SiGe samples across the entire layer thickness
We report the results of investigation of the thermopower (Seebeck effect) of a ThCr2Si2-structured heavy fermion single-crystalline YbPd2Si2 compound (itterbium-palladium-silicon, 1 …
Benefits of XPS nanocharacterization for process development and ...
2017年11月1日 · In this paper, X Ray Photoelectron Spectroscopy (XPS) has been used to characterize the SiGe channel layer. XPS is a well-established method for the analysis of …
SiGe nanocrystals in SiO2 with high photosensitivity from visible to ...
2020年2月24日 · TEM investigations reveal the major changes in films morphology (SiGe NCs with different sizes and densities) produced by Si:Ge ratio and annealing temperature. XPS …
Experimental study of the ultrathin oxides on SiGe alloy formed …
2020年3月1日 · In this study, the compositions of ultrathin oxides (<1.2 nm) formed by oxidizing SiGe surface are characterized using X-ray photoelectron spectroscopy (XPS) technology as a …
Hybridization of ellipsometry and XPS energy loss: Robust band …
2024年1月1日 · In this study, we compare the robustness of optical constants and optical band gap determination of three different materials: SiGe, N-doped HfO 2 and MoO x, using the …
Strain/lattice characterization of Si + Ge, SiGe + Ge, SiGe + C and …
2023年2月23日 · We investigated 1-D and 2-D chemical depth mapping using SIMS, XPS and TEM-EDX. For strain/lattice spacing engineering effects, we used XRD and Raman analysis …
Silicon-Germanium (SiGe) composition and thickness
2014年5月1日 · The thickness and composition determination of Silicon-Germanium (SiGe) films have been demonstrated using simultaneous X-ray Photoelectron (XPS) and X-ray …
Based on the understanding of oxidation kinetics, we design the gate stack formation process and demonstrate very good C-V characteristics on SiGe with Si-cap free passiva-tion, by direct …
a XPS spectra of as-grown SiGe. XPS spectra of LPD-SiO 2 with …
In the present work we study the extent to which extrinsic chemical and field effect passivation can improve the overall electrical passivation quality of silicon dioxide on silicon. Here we...