Integrated Gas Delivery Systems (IGS) have become the new standard in Gas Delivery Platforms. IGS systems reduce maintenance times and improve uptime, and the Talon IGS (called TMS®, Talon Modular System) has become the industry standard for gas and liquid delivery systems.

IGS (Integrated Gas Supply) Panel 자체 설계능력 사실상 국내 유일 C-seal 전문 업체로 10년간 1000대 이상 제작 판매 실적. W-seal is needs special care for other components and delivery time. ．설치면적 최소화로 동선의 감소 및 공간 절약이 가능. - 국내/해외 1000 세트 판매 및 운용.

FITOK IGS 模块化气体系统采用符合 SEMI 标准的表面安装元件，进行模块化设计，在缩小设备体积的同时，安装和维护反而变得更简单。

2020年6月24日 · FITOK Integrated Gas System (IGS) adopts surface mount components conforming to SEMI standard for modular design, which makes installation and maintenance simpler while reducing the size of the system.

The IGS shall develop a standard protocol for exchanging information about IGS stations. The associated machine-readable database should be maintained by the IGS CB. Input to the database are stemming from

Ichor’s TMS (Talon Modular System) gas delivery system offers a smaller envelope, configurability covering 1.125” standard flow to 1.50” high flow C and W-Seal, increased productivity and reduced maintenance time. Modular gas delivery systems are rapidly replacing conventional gas panels as the industry standard. Read More...

igs标准通气基座采用模块化设计，具备符合semi标准的可靠的密封与耐腐蚀能力。 用户根据不同的气体配置需求，可构建紧凑的并方便安装维护的气体传输系统结构。

富创是国内领先的半导体零部件核心制造商，生产的高耐腐蚀、超高洁净零部件已在7nm制程工艺设备中广泛应用。 公司专注于金属材料零部件精密制造技术，掌握多种高端制造工艺，产品性能达国际主流标准，服务于国内外半导体设备龙头企业。

FITOK 模块化气体系统 (Integrated Gas System) 是一种用于半导体行业气体控制的集成系统,集成了阀门、接头等管道元件以及其它必要的测量与控制仪器。 模块化气体系统采用符合 SEMI 标准的表面安装元件,进行模块化设计,在缩小设备体积的同时,安装和维护反而变得更简单。 体积约为传统面板的 1/3, 流道尺寸相应缩小, 有利于控制沾污。 每个密封面都有检漏孔。 IGS 系统选用镀银螺栓安装,防咬死。 镀银螺栓可单独订货,型号: BL-M4×10 (长 10 mm) BL-M4×30 (长 30 mm)更多 …

IGS的基本概念. ①基本技术的高性能化：安全，洁净 ②小型化 ③提高可靠性 Wseal：密封部分于承受外力部分分离 水平系统：以七米部位与中心的基民施工结构 镀银螺帽及螺丝 ④提高施工性、维护性 构成部件的完全上部拆装方式 泄漏端口、专用工具 ⑤标准化的 ...