Fabrication of high-quality single-crystal Cu thin films using …
2014年8月29日 · In this work, we demonstrated high-quality Cu thin films using a single-crystal Cu target and radio-frequency (RF) sputtering technique; the resulting film quality was comparable …
(PDF) Cu Thin Films Deposited by DC Magnetron Sputtering for …
2011年12月1日 · Cu layers 54–853 nm thick were deposited by DC magnetron sputtering at room temperature from a Cu target with a sputtering power of 2.07 W × cm−2 in an argon …
Effect of sputtering process parameters on the uniformity of …
2023年7月1日 · In this paper, Cu film was prepared by DC magnetron sputtering and the effect of different sputtering process parameters on the uniformity of Cu film deposited in micro-via was …
Structure and stress of Cu films prepared by high power pulsed ...
2019年2月1日 · Owing to its high ionization degree, high power pulsed magnetron sputtering (HPPMS) has proven advantageous for Cu film growth. In this study, Cu films with different …
On the Microcrystal Structure of Sputtered Cu Films Deposited on …
2023年6月15日 · Sputtered Cu/Si thin films were experimentally prepared at different sputtering pressures and characterized using X-ray diffraction (XRD) and an atomic force microscope …
Ultra-high thermal stability of sputtering reconstructed Cu …
2021年12月10日 · Herein, we fabricate the SMSI between sputtering reconstructed Cu and flame-made LaTiO 2 support at a mild reduction temperature, exhibiting an ultra-stable performance …
Epitaxial growth of Cu (001) thin films onto Si (001) using a …
2017年5月10日 · We report on a new route to grow epitaxial copper (Cu) ultra-thin films (up to 150 nm thick) at ambient temperature on Si (001) wafers covered with native oxide without any …
We have developed pre-treatment, Cu sputtering, and CVD-Co technologies for semiconductor Cu interconnect technology. A new remote plasma process in the pre-treatment technology …
Properties of ultra-thin Cu films grown by high power
2017年6月1日 · In this study, we investigated the influence of the pulsing frequency and the ion-to-atom ratio at direct-current (DC) and high power impulse magnetron sputtering on the …
Sputtering - SpringerLink
2022年8月20日 · Sputtering yield of Cu bombarded by Ar ions as function of low ion energies. The black line and the blue line give sputtering yield according to the Sigmund theory and the …