2023年1月7日 · Copper vapour deposition using chemical vapour deposition (CVD) on aluminium may have applications in a variety of areas, including aerospace and transportation, among …

1997年11月1日 · Selective deposition using copper CVD is an alternative to the metallization with Cu CVD plus Cu CMP. We will focus our approach to selective copper CVD on recent …

2014年12月9日 · Pure and defect-free copper features can be created at these and smaller scales using gas phase deposition methods such as chemical vapor deposition (CVD) and atomic …

1997年11月1日 · On the past few years, copper CVD has been intensively studied. Highly conformal deposition processes become necessary for the high aspect ratio expected at the …

The use of copper organometallics is an established route to generate thin films of copper. This paper describes the deposition of copper and copper (I) oxide films using relatively …

ALD and CVD of Copper-Based Metallization for Microelectronic Fabrication Yeung Au, Youbo Lin, Hoon Kim, Zhengwen Li, and Roy G. Gordon Department of Chemistry and Chemical …

1997年3月19日 · Chemical research to identify the "ideal" precursor for copper CVD is still actively being pursued by our group and others. We give here our last results on the …

1992年3月1日 · Phosphite copper(i) trifluoroacetates [((RO)3P)mCuO2CCF3] (m = 1, 2, 3): synthesis, solid state structures and their potential use as CVD precursors. Dalton …

In chemical vapor deposition (CVD) growth of graphene, intrinsic carbon in copper has been shown to play a role, especially during the nucleation phase. Here, we report experimental …

We report that high-quality single-layer graphene (SLG) has been successfully synthesized directly on various dielectric substrates including amorphous SiO 2 /Si by a Cu-vapor-assisted …