ASML still pursuing maskless litho - EE Times
2006年11月9日 · At the time, many thought ASML threw in the towel for maskless. Instead, the company pursued its traditional optical lithography business, while also developing immersion …
Maskless Lithography: A Game Changer for Chip Manufacturers
2025年1月20日 · For now, semiconductor manufacturer ASML (ASML +2.79%) has a monopoly on EUV. Both DUV and EUV machines are big, expensive, and power-hungry. Another option …
无光罩光刻，靠谱吗？ - 知乎 - 知乎专栏
虽然路漫漫其修远，但是长期以来业界确实一直在研究无光罩光刻(maskless)。 传统的光刻通过不同波长的光将光罩上的图形投影至晶圆之上，所以也被称为光学投影光刻。而由于无需光罩， …
ASML, Micronic form maskless lithography venture - EE Times
2003年7月18日 · Under a memorandum of understanding, the two companies will develop an optical maskless lithography system, based on ASML's lithography tools and Micronic' pattern …
Micronic Laser Systems and ASML announce intended joint …
2003年7月18日 · Micronic Laser Systems AB (Micronic) and ASML Holding NV (ASML) today announced that the two companies have signed a memorandum of understanding to form a …
Micronic, ASML cooperate on optical maskless lithography
2004年12月21日 · Micronic Laser Systems AB (Taby, Sweden) and ASML Netherlands BV (Veldhoven, The Nethherlands) have signed a license agreement that gives ASML the right to …
ASML, Micronic continue to work on maskless litho - EDN
2004年9月16日 · For years, ASML and Micronic have been working together on a maskless tool, based on Micronic's spatial light modulator (SLM) technology. The approach builds on …
ASML, Micronic scrap standalone maskless tool project - EDN
2004年9月24日 · ASML and Micronic are still developing micromirror technology for use in maskless lithography, but the companies are no longer developing a standalone tool as …
ASML Keen on Optical Maskless Technology - EDN
2003年11月14日 · Dutch lithography tool vendor ASML said today that it could ship optical maskless exposure tools to customers in as little as three years. In a presentation during an …
无光罩光刻，靠谱吗？ - 36氪
虽然路漫漫其修远，但是长期以来业界确实一直在研究无光罩光刻 (maskless)。 传统的光刻通过不同波长的光将光罩上的图形投影至晶圆之上，所以也被称为光学投影光刻。 而由于无需光 …