ALD (Atomic Layer Deposition) - ASM
ASM is the leading supplier of Atomic Layer Deposition, or ALD, equipment and process solutions for semiconductor manufacturing. ALD is the most advanced deposition method in the market, …
Eagle® XP8 PEALD - ASM
Eagle XP8 is a high-productivity 300mm tool for plasma-enhanced ALD (PEALD) applications. The Eagle XP8 PEALD system can be configured with up to four Dual Chamber Modules …
XP8® QCM PEALD - ASM
XP8 QCM is a 300mm tool for high-productivity plasma enhanced atomic layer deposition (PEALD) for advanced node memory and logic applications. The QCM, or Quad Chamber …
ASM SYNERGIS ® ALD 300 mm wafer production ALD system
Synergis® is a high productivity 300mm tool for a wide range of thermal ALD applications. The Synergis system can be configured with up to four Dual Chamber Modules (DCM), enabling …
BALD Engineering - Born in Finland, Born to ALD: ASM …
2019年1月23日 · The QCM chambers use the same advanced reactor technology as ASM's original PEALD and PECVD XP8 Dual Chamber Modules (DCMs). Hundreds of these DCMs …
ASM Eagle XP8 • Manufacturer: ASM • Model: Eagle XP • Wafer Size: 300mm • Platform: ASM XP8 CVD o XP8 platform includes: AFE, FERB and BERB o 4 Load Ports (SINFONIA N2 …
ASM Eagle XP8 Plasma Enhanced ALD Tool • Manufacturer: ASM International • Model: Eagle XP8 • Wafer Size: 300mm • XP8 Platform • Front and rear Operations/Maintenance Touch …
ASM XP8® QCM PEALD Tool - Atomic Layer Deposition
XP8 QCM is a 300mm tool for high-productivity plasma-enhanced atomic layer deposition (PEALD) for advanced node memory and logic applications. The QCM, or Quad Chamber …
PTW ASIA | ASM Eagle XP-8 DCM
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ASM Eagle XP8 PEALD Tool - Atomic Layer Deposition
The Eagle XP8 PEALD system can be configured with up to four Dual Chamber Modules (DCM), enabling eight chambers in high-volume production within a very compact footprint. Eagle XP8 …