2019年10月18日 · ZnO grown by atomic layer deposition (ALD) is an interesting material for electronic applications requiring low processing temperature. Herein, it is shown that the …

2025年3月1日 · ALD growth of Al and Mg-doped ZnO thin films on the quartz substrate. XRD results show the formation of hexagonal crystal symmetry. SEM and AFM results affirmed the …

2016年11月30日 · Applying atomic layer deposition (ALD), very thin zinc oxide (ZnO) films were deposited on quartz resonators, and their gas sensing properties were studied using the …

2019年7月6日 · Atomic layer deposition (ALD) of ZnO offers unique advantages such as precise thickness control, uniformity, and conformality. Using reactive plasma species as the co …

2021年1月13日 · The AZO thin film is deposited successfully by atomic layer deposition (ALD). 50 nm-thick AZO film with high uniformity is checked by scanning electron microscopy. The …

5 天之前 · Etching at <205 °C was restricted because HF adsorption on fluorinated Al 2 O 3 led to competing AlF 3 ALD. In contrast, ZnO ALE at temperatures as low as 30 °C is possible …

2018年12月19日 · Atomic layer deposition (ALD) is a unique thin-film synthesis technique, featuring its extreme uniformity, unrivaled conformal coverage, low deposition temperature, …

2016年10月1日 · ALD grown ZnO thin films have gained substantial interest in the field of semiconductor research because of their high purity, ultra thinness and crystallinity which …

2025年3月26日 · In this work, micro Zn-doped Ga2O3 films (GZO) were deposited by one-step mixed atomic layer deposition (ALD) followed by post-thermal engineering. The effects of Zn …

Initially, the effects of deposition temperature on the electrical properties of single-component $\text{In}_2\mathrm{O}_{3}$ and $\text{ZnO}$ thin-film transistors are explored. It was found …