2018年12月11日 · Atomic layer deposition (ALD) of TiO 2 was performed in tandem with in situ surface-enhanced Raman spectroscopy (SERS) to monitor changes in the transient surface …

2021年6月1日 · Atomic layer deposition (ALD) has emerged as a promising technique to synthesize robust thin films. The self-limiting mechanism, a unique feature of ALD, enables …

2023年1月15日 · Titanium dioxide (TiO 2) thin films are produced by atomic layer deposition (ALD) since the beginning of the 90′s [1]. TiO 2 films can have an amorphous or crystalline …

2013年9月2日 · Atomic layer deposition (ALD) of thin films from TiCl 4 and O 3 on Si(100) substrates was investigated. The growth of TiO 2 was obtained at substrate temperatures of …

2025年1月7日 · This study investigates the presence of titanium oxynitride bonds in titanium dioxide (TiO 2) thin films grown by atomic layer deposition (ALD) using tetrakis dimethyl amino …

TiO2 极化率 （αopt） 随材料密度的变化是由 n 值确定的，显示极化率随材料密度的变化很大，与其他研究一致并互补。 对低频介电性能的研究表明，TiO2 中的损耗和松弛随着沉积温度的升 …

2016年6月24日 · The best-performance devices based on optimized TiO 2 compact film (by 2000 cycles ALD) can achieve power conversion efficiencies (PCEs) of as high as 7.82%. …

2017年5月17日 · 从沉积温度、等离子体的增强作用、沉积载体、掺杂及应用等方面综述了 ALD法制备纳米 TiO 2 薄膜的相关研究进展。

2018年6月14日 · Atomic layer deposition (ALD) was used to modify two different types of carbon black-based Pt oxygen reduction catalysts with protective TiO2 nanostructures to increase …

In this topical review we summarize the advances in research of ALD of titanium dioxide starting from the chemistries of the over 50 different deposition routes developed for TiO2 and the …