UV radiation is invisible to the eye and it is non-ionizing form of radiation in the 100 nm to 400 nm wavelength region of the electromagnetic spectrum. UV radiation is arbitrarily divided into UV-A ...
Photolithography at a wavelength of 193 nm in the deep UV with water immersion lenses can now produce microelectronics containing features with a half-pitch as small as 40 nm. The big question is ...
Extreme ultraviolet (EUV) lithography is the next step in this trend. It uses radiation of wavelength 13.5 nm, thereby offering significant potential to extend the resolution of photolithography ...